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 <title>BedeMetrix™-F Offers Combined XRR/XRF Capability for High Speed Film Thickness Measurements on Patterned Wafers</title>
 <link>http://www.instrumentationews.com/bedemetrix_f_offers_combined_xrr_xrf_capability_for_high_speed_film_thickness_measurements_on_patterned_wafers</link>
 <description>The family of BedeMetrix™-F tools offers fully-automated X-ray metrology for high volume semiconductor manufacturing. Proven at leading global manufacturers in 24/7 production environments, the tools deliver internally calibrated, non-destructive control of advanced semiconductor processes...</description>
 <category domain="http://www.instrumentationews.com/daily_news/measurement">Measurement</category>
 <category domain="http://www.instrumentationews.com/daily_news/metrology">Metrology</category>
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 <pubDate>Sun, 28 Aug 2005 04:51:44 +0200</pubDate>
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 <title>X-ray detector delivers unique thin film analysis</title>
 <link>http://www.instrumentationews.com/x_ray_detector_delivers_unique_thin_film_analysis</link>
 <description>Microbeam X-ray fluorescence metrology systems enable an unprecedented level of analysis for thin film applications in the semiconductor and microelectronics industries</description>
 <category domain="http://www.instrumentationews.com/daily_news/sensors">Sensors</category>
 <category domain="http://www.instrumentationews.com/daily_news/sensors/microelectromechanical_mems">Microelectromechanical (MEMS)</category>
 <category domain="http://www.instrumentationews.com/daily_news/sensors/radiation_sensors/x_ray_sensors">X-Ray Sensors</category>
 <pubDate>Mon, 20 Jun 2005 14:43:11 +0200</pubDate>
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