20 March 2007 -- The fourth generation digital micro-electro-mechanical systems (MEMS) chip is designed to sense liquid flow in microfluidic systems, Sensirion said, and can detect and accurately measure very low liquid flow rates.
The company also added that the high level of on-chip integration had resulted in significant reductions in cost, size and weight. The chip weighs a total of six grams.
Capable of response times in the millisecond range, the chip allows for the monitoring and controlling of dynamic effect in microfluidic systems.
