April 26 2007 -- The Span Lab Cal Cart is a multi-channel standards generator designed for clean room service. The Cal Cart system uses Trace Source permeation (or diffusion) tubes as the source for analyte vapors. The system features four independently controlled channels for delivering standards of multiple analytes. Concentrations from < 1 ppb to > 10ppm can be produced. Mixtures can be delivered dry or humidified at 20 - 90 percent RH. A dual dilution system gives varying concentrations while maintaining constant output flow.
The Span Lab Cal Cart is designed for portability within a facility. It is available with internal battery power, and an onboard supply of air or N2 to permit unsupported operation in transit or in remote areas.
Many AMC monitors feature an internal standard for routine calibration checks. The Span Lab Cal Cart allows facility wide synchronization of AMC data with traceability to NIST through physical standards.
A typical application is calibration for NMP and ammonia in semiconductor micro-lithography facilities. Other applications include calibration for acid gases, sulfur compounds, volatile siloxanes and VOCs in semiconductor and biotechnology clean rooms.
Source: Thomasnet
