X-Ray Sensors
BedeMetrix™-F Offers Combined XRR/XRF Capability for High Speed Film Thickness Measurements on Patterned Wafers
Submitted by nestorb on Sat, 2005-08-27 22:51. The family of BedeMetrix™-F tools offers fully-automated X-ray metrology for high volume semiconductor manufacturing. Proven at leading global manufacturers in 24/7 production environments, the tools deliver internally calibrated, non-destructive control of advanced semiconductor processes...
X-ray detector delivers unique thin film analysis
Submitted by nestorb on Mon, 2005-06-20 08:43. Microbeam X-ray fluorescence metrology systems enable an unprecedented level of analysis for thin film applications in the semiconductor and microelectronics industries
